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Laser Micromachining Systems

Whether your requirement is for an industrial-grade manufacturing tool or a system dedicated to research, we have an array of laser micromachining products to match your needs. All systems can be supplied with a wide range of lasers to meet the application requirements. Contact us to discuss your application and requirements. 

ProbeDrill System

Vertical Guide Plate Production Tool

Oxford Lasers precision micromachining systems
  • Fine Pitch
  • Range Of Hole Shapes: Square, Round, Rectangular, Elliptical etc.
  • Higher Hole Count

Durable by design, the ProbeDrill from Oxford Lasers is a hardwearing turnkey laser system preconfigured specifically for guide plate production.

The ProbeDrill is one of our purpose-built laser micromachining tools. Used for the production of guide plates for vertical probe cards, the ProbeDrill is optimized to deliver the finest features within extremely tight tolerances. As you would expect from us, the system chassis features a top quality granite base with exceptional anti-vibration mounts to ensure optimum processing conditions. 

Please contact us for more information on the ProbeDrill.

ProbeDrill Specifications
Laser Type
Diode Pumped Solid State (DPSS)
2800 W x 1700 D x 2040 H (mm)
Product Weight

Laser Systems Comparison Table

Laser Type
Wavelength Options
Dimensions (W x D x H in mm)
A Series
Compact, entry-level turnkey laser system
nanosecond or femtosecond
1470 x 1500 x 1950
up to 1500kg
C Series
High throughput production system
nanosecond, picosecond or femtosecond
2800 x 1700 x 2040
up to 2700kg
J Series
Largest, high-powered system with multiwavelength option
up to any two of: nanosecond, picosecond or femtosecond
Up to any two of: 355nm/532nm/1064nm
Dependent on laser type and options
Dependent on laser type and options
ProbeDrill System
Preconfigured system for semiconductor guide plate probe card drilling
Diode pumped solid state (DPSS)
2800 x 1700 x 2040
SamplePrep System
Preconfigured system for preparing micro samples for X-ray microscopy (XRM)
Diode pumped solid state (DPSS)
1470 x 1200 x 1950