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Laser Micromachining Systems

Whether your requirement is for an industrial-grade manufacturing tool or a system dedicated to research, we have an array of laser micromachining products to match your needs. All our systems can be supplied with a wide-range of lasers to meet the application requirements. Contact us to discuss your application and requirements. 

A-Series Oxford Lasers micromachining system

A Series

The most compact platform in the Oxford Lasers portfolio, the A Series was designed as an entry-level laser micromachining tool for both production and R&D use.

A Series Compact Laser System

Capable and compact, the A Series platform delivers impressive laser micromachining capabilities. It is a small-footprint, free-standing system with a granite frame for rock-solid stability that is essential for vibration isolation to enable precision laser micromachining.
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Oxford Lasers C Series Turnkey Laser System

C Series

Efficient and robust, the C Series platform is a turnkey laser micromachining tool designed specifically for high-throughput production.

C Series Production Laser

Robust and designed for 24/7 operation, the C series laser system is the easy-to-use, work horse of our laser systems. Choice of nano, pico or femtosecond pulsed laser with motion control options and granite frame for ultimate stability, the C Series is a designated production tool. Having spent over 45 years working with lasers and laser technology, this was designed for our own high-volume contract services laboratory which we now offer to our customers.
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Oxford Lasers precision micromachining systems

J Series

Power, precision and flexibility, the J Series is the most advanced precision laser micromachining system in the Oxford Lasers range, designed to meet the demands of the most challenging process applications.

J Series

A tool of ultimate precision, the J Series platform is the largest of our laser micromachining platforms. Designed to be proficient in technically challenging applications, from machining transparent materials to high aspect ratio features. the J Series is commonly built with either a high-powered picosecond or femtosecond laser and has the option to include multi-wavelength capabilities. This is a flexible platform that can be integrated with part-handling solutions. The J Series is typically used for cutting edge production and R&D. Please contact us for more information on the range of options and accessories available for the J Series.
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ProbeDrill System

Durable by design, the ProbeDrill from Oxford Lasers is a hardwearing turnkey laser tool preconfigured specifically for laser drilling of guide plates used in semiconductor probe card heads.

ProbeDrill Laser System

The ProbeDrill is one of our purpose-built laser micromachining tools. Used for the laser drilling of guide plates in the production of vertical probe cards, the ProbeDrill is optimized to deliver the finest features in holes within extremely tight tolerances. As you would expect from us, the system chassis features a top quality granite base with exceptional anti-vibration mounts to ensure optimum processing conditions.
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SamplePrep System

Specific and refined, the SamplePrep tool is a laser-based micromachining system preconfigured to prepare micro samples for X-ray microscopy (XRM).

SamplePrep Laser System

The system is capable of producing micro-pillars with diameters measuring from tens to hundreds of microns from macroscopic bulk samples. Built with an integrated vision system, users are able to identify and target a specific area from the bulk (macro) sample in which to take the pillar (micro) sample, ensuring the user retains control over sample choice. Programmed with our advanced laser processing capability, the SamplePrep tool is capable of processing a wide range of materials such as rock, ceramics, metals and semiconductors.
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Laser Micromachining Systems Comparison Table

Laser Type
Wavelength Options
Dimensions (W x D x H in mm)
Compact, entry-level turnkey laser system
nanosecond or femtosecond
1470 x 1500 x 1950 (Extractor: 300 x 300 x 460)
up to 1500kg
High throughput production system
nanosecond, picosecond or femtosecond
2800 x 1700 x 2040
up to 2700kg (Dependent on laser type and options)
Largest, high-powered system with multiwavelength option
up to any two of: nanosecond, picosecond or femtosecond
Up to any two of: 355nm/532nm/1064nm
Dependent on laser type and options
Dependent on laser type and options
Preconfigured system for semiconductor guide plate probe card drilling
Diode pumped solid state (DPSS)
2800 x 1700 x 2040
Preconfigured system for preparing micro samples for X-ray microscopy (XRM)
Diode pumped solid state (DPSS)
1470 x 1200 x 1950 (Extractor: 300 x 200 x 460)

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